Comparison on Morphological and Optical Properties of TiO2 Thin Films Grown by Single-Pulse and Multi-Pulse Laser Ablation
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Author(s)
TiO2 thin films were prepared on glass substrates using the PLD (Pulsed Laser Deposition) technique.
In order to carry out the ablation process, a Nd:YAG laser was used emitting in 1064 nm
wavelength at 10 Hz repetition rate, set up for operating in both single-pulse and multi-pulse regimes.
A comparison of the deposition rate, the optical and morphological properties of the layers
obtained from both ablation regimes was made, which showed that the multi-pulsed ablation
produced layers with a higher surface quality and better optical properties.
Cite this paper
Peñaloza-Mendoza, Y. and Ponce-Cabrera, L. (2015)
Comparison on Morphological and Optical Properties of TiO2 Thin Films Grown by Single-Pulse and Multi-Pulse Laser Ablation. Journal of Surface Engineered Materials and Advanced Technology, 5, 17-23. doi: 10.4236/jsemat.2015.51002.
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