Phase Identification Using Series of Selected Area Diffraction Patterns and Energy Dispersive Spectrometry within TEM
Read full paper at: http://www.scirp.org/journal/PaperInformation.aspx?PaperID=50833#.VE3C-VfHRK0 Author(s) Kun-Lin Lin Affiliation(s) National Nano Device Laboratories, Hsinchu, Taiwan . ABSTRACT Transmission electron microscopy (TEM) is a very powerful technique for materials characteriza-tion, providing information relating to morphology, composition, and crystal structure. Selected area diffraction patterns (SADPs) are crystallographic data that can be obtained using a TEM in-strument. Conventional identification through SADP/TEM is tricky and tedious, thereby increasing the difficulty of phase identification. To establish a procedure for phase identification of known and unknown phases, in this ...