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Effects of CW CO2 Laser Annealing on Indium Tin Oxide Thin Films Characteristics

Read full paper at: http://www.scirp.org/journal/PaperInformation.aspx?PaperID=50331#.VDc9Q1fHRK0 Author(s)    Forat H. Alsultany , Naser M. Ahmed , M. Z. Matjafri Affiliation(s) Nano-Optoelectronics Research and Technology Laboratory, School of Physics, Universiti Sains Malaysia, Penang, Malaysia . ABSTRACT In this work ITO thin film annealing was carried out using a CW CO2 laser beam for ITO thin film annealing over a 1 cm2 area with a temperature higher than 250°C to obtain ITO grains with excellent structural quality thin films. The obtained ITO films were characterized for crystallization, surface morphology, electrical and optical properties, which has theoretical significance and application value. ITO thin films are depos...