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Effects of CW CO2 Laser Annealing on Indium Tin Oxide Thin Films Characteristics

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In this work ITO thin film annealing was carried out using a CW CO2 laser beam for ITO thin film annealing over a 1 cm2 area with a temperature higher than 250°C to obtain ITO grains with excellent structural quality thin films. The obtained ITO films were characterized for crystallization, surface morphology, electrical and optical properties, which has theoretical significance and application value. ITO thin films are deposited on glass substrates by sputter coater system (RF) from a high density target (In2O3-SnO2, 90-10 wt%). After deposition, ITO thin films have been irradiated by CW CO2 laser (λ = 10.6 μm) with power ranging from 1 to 10 watt. These films were annealed at temperatures 250°C, 350°C, and 450°C in the air for 20 minutes using different laser power. The main incentive was to develop a low temperature process for ITO thin films, which typically required a 350°C anneal to crystallize and achieve optimum optical and electrical properties. The XRD results showed that 350°C temperature laser annealing could crystallize ITO with a strong (222) preferred orientation and its grain size increased from 29.27 nm to 48.63 nm. The structure, optical transmission, energy gap, resistivity and sheet resistance of the ITO thin films were systematically investigated as a function of laser post annealing temperature. It was found that the lowest resistivity was 2.9 × 10－4 Ω-cm and that sheet resistance was 14.5 Ω/sq. And the highest optical transmittance (98.65%) of ITO films was obtained at 350°C annealing temperature.
Cite this paper
Alsultany, F. , Ahmed, N. and Matjafri, M. (2014) Effects of CW CO2 Laser Annealing on Indium Tin Oxide Thin Films Characteristics. Soft Nanoscience Letters, 4, 83-89. doi: 10.4236/snl.2014.44012. 
 

[1] Tamhankar, A., Bovatsek, J., Guadano, G. and Patel, R. (2009) Advantages of Using DPSS Nanosecond Laser with a Gussian Beam Shape for Scribing Thin Film Photovoltaic Panels. Proceedings of ICALEO 2009 Conference, Orlando, 2-5 November 2009, 1251-1259.
[2] Majumbar, J.D. and Manna, I. (2003) Laser Processing of Materials. Sadhana, 28, 495-562.
[3] Cheng, J.-Y., et al. (2004) Direct-Write Laser Micromachining and Universal Surface Modification of PMMA for Device Development. Sensors and Actuators B: Chemical, 99, 186-196.
http://dx.doi.org/10.1016/j.snb.2003.10.022
[4] Baum, M., Kim, H., Alexeev, I., Piqué, A. and Schmidt, M. (2013) Generation of Transparent Conductive Electrodes by Laser Consolidation of LIFT Printed ITO Nanoparticle Layers. Applied Physics A, 111, 799-805.
http://dx.doi.org/10.1007/s00339-013-7646-y
[5] Lee, Y.-L. and Lee, K.-M. (2009) Effect of Ambient Gases on the Characteristics of ITO Thin Films for OLEDs. Transactions on Electrical and Electronic Materials, 10, 203-207.
[6] Farahamndjou, M. (2013) The Study of Electro-Optical Properties of Nanocomposite ITO Thin Films Prepared by E- Beam Evaporation. Revista Mexicana de Física, 59, 205-207.
[7] Kalhor, D., Ketabi, S.A., Ebrahimzad, A. and Moosa Rezaei, M. (2009) Annealing Effects on Opto-Electronic Properties of Thermally-Evaporated ITO/Ag/ITO Multilayered Films for Use in Color Filter Electrodes. World Applied Sciences Journal, 6, 83-87.
[8] Rozati, S.M. and Ganj, T. (2005) Characterization of Transparent Conductive Thin Films of In2O3: Sn by Spray Pyrolysis Technique. American Journal of Applied Science, 2, 1106-1108.
http://dx.doi.org/10.3844/ajassp.2005.1106.1108
[9] Ramanaa, C.V., Smitha, R.J., Hussainb, O.M. and Julienc, C.M. (2004) On the Growth Mechanism of Pulsed-Laser Deposited Vanadium Oxide Thin Films. Materials Science and Engineering B, 111, 218-225.
http://dx.doi.org/10.1016/j.mseb.2004.04.017
[10] Kim, D. (2013) Effect of a TiO2 Buffer Layer on the Properties of ITO Films Prepared by RF Magnetron Sputtering. Transactions on Electrical and Electronic Materials, 14, 242-245.
http://dx.doi.org/10.4313/TEEM.2013.14.5.242
[11] Lee, C.J., Lin, H.K., Li, C.H., Chen, L.X., Lee, C.C., Wu, C.W. and Huang, J.C. (2012) A Study on Electric Properties for Pulse Laser Annealing of ITO Film after Wet Etching. Thin Solid Films, 522, 330-335.
http://dx.doi.org/10.1016/j.tsf.2012.09.010
[12] Zimmermann, B., Glatthaar, M., Niggermann, M., Riede, M.K. and Hinsch, A. (2007) ITO-Free Wrap through Organic Solar Cells—A Module Concept for Cost-Efficient Reel-to-Reel Production. Solar Energy Materials and Solar Cells, 91, 374-378.
http://dx.doi.org/10.1016/j.solmat.2006.10.005            eww141010lx
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