Characteristics of La0.7Sr0.3MnO3 Films Modified by Aluminum Ions Implantation and Post-Implantation Annealing
Read full paper at: http://www.scirp.org/journal/PaperInformation.aspx?PaperID=53353#.VMBdBizQrzE Author(s) Shaoqun Jiang 1* , Gang Wang 1 , Xinxin Ma 2 , Xinxin Ma 2 , Guangze Tang 2 Affiliation(s) 1 College of Mechanics and Materials, Hohai University, Nanjing, China . 2 School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, China . ABSTRACT The magnetron sputtered La 0.7 Sr 0.3 MnO 3 films were implanted with different doses (5 ′ 10 15 ions×cm?2 and 5 ′ 10 16 ions×cm ?2 ) of Al ions at different negative pulsed voltages (30 kV and 50 kV) by plasma based ion implantation and then annealed at 973 K for 1 h in air. The microstructure, surface morphologies, surface roughness, metal-insulator transition and room temperature emittance properties of the post-implantation annealed films were investigated and compared with those of the La 0.7 Sr 0.3 MnO 3 film annealed at 973 K for 1 h in a...