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Structural Analysis of ZnO Film Deposited by Means of Metal Organic Decomposition Method

Read full paper at: http://www.scirp.org/journal/PaperInformation.aspx?PaperID=51273#.VGGibmfHRK0 Author(s) Masato Ohmukai 1 , Takuya Nakagawa 2 , Masaru Kamano 3 , Nobutomo Uehara 3 Affiliation(s) 1 Department of Electrical and Computer Engineering, Akashi College of Technology, Akashi, Japan . 2 Technical Education Support Center, Akashi College of Technology, Akashi, Japan . 3 Department of Electrical and Electronic Engineering, Anan National College of Technology, Anan, Japan . ABSTRACT ZnO films were deposited on glass substrates by means of a metal organic decomposition (MOD) method. We investigated the effect of annealing temperature, time and the number of laminated layers on the film structure on the ...