Read full paper at: http://www.scirp.org/journal/PaperInformation.aspx?PaperID=53351#.VMBdBCzQrzE Author(s) Yang Yu , Daniel Mansfield Affiliation(s) Taylor Hobson Ltd., PO Box 36, 2 New Star Road, Leicester, LE4 9JQ, UK . ABSTRACT Accurate measurement of film thickness and its uniformity are very important to the performance of many coated surfaces and for many applications are critical. Effective inspection of the film thickness and uniformity is the key to high performance. Conventionally, film thickness is meas- ured using a spectrophotometer/reflectometer, ellipsometer or a physical step measurement; however, these techniques all have limitations. Coherence Scanning Interferometry (CSI) is an established method to measure surface topography as this technique offers many advantages such as speed, ease of use and accuracy. The measurement of “thick” films (exceeding ~1.5 μm) which gives rise to clearly separate fringe bunches is a well-es...
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