Mathematical Modeling and Experimental Validation of Mixed Metal Oxide Thin Film Deposition by Spray Pyrolysis
Read full paper at: http://www.scirp.org/journal/PaperInformation.aspx?PaperID=53136#.VLXWacnQrzE Author(s) S. M. Navid Khatami 1 , Olusegun J. Ilegbusi 1 , Leonid I. Trakhtenberg 2 Affiliation(s) 1 Department of Mechanical and Aerospace Engineering, University of Central Florida, Orlando, FL, USA . 2 Semenov Institute of Chemical Physics, Russian Academia of Sciences, Moscow, Russia . ABSTRACT The deposition of metal oxide films using Spray Pyrolysis Technique (SPT) is investigated through mathematical and physical modeling. A comprehensive model is developed in the processes including atomization, spray, evaporation, chemical reaction and deposition. The predicted results including particle size and film thickness are compared with the experimental data obtained in a complementary study. The predicted film thickness is in a good agreement with the measurements when the temperature is high enough for the chemical ...