Heat Resistant Properties of Some Elements-Incorporated Diamond-Like Carbon Films and Their Trial Applications for Micro End Mill Coatings
Read full paper at: http://www.scirp.org/journal/PaperInformation.aspx?PaperID=52961#.VK3sgcnQrzE Author(s) Chavin Jongwannasiri 1 , Nutthanun Moolsradoo 2 , Shuichi Watanabe 3 Affiliation(s) 1 Systems Engineering Major, Graduate School, Nippon Institute of Technology, Saitama, Japan . 2 Production Technology Education Department, King Mongkut’s University of Technology Thonburi, Bangkok, Thailand . 3 Department of Innovative Systems Engineering, Nippon Institute of Technology, Saitama, Japan . ABSTRACT In this article, the results obtained from a study carried out on the some elements-incorporated diamond-like carbon (DLC) films are reported. All the films were deposited using plasma-based ion implantation (PBII) technique. The deposited films were annealed at 400℃, 650℃ and 900℃ in an air atmosphere for 1 hour. The effects of adding hydrogen, silicon/oxygen and silicon/nitrogen into the DLC film on chemical composition, friction coefficient and corro...