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Characterisation of Thin Films Using a Coherence Scanning Interferometry

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http://www.scirp.org/journal/PaperInformation.aspx?PaperID=53351#.VMBdBCzQrzE

Author(s) 
Yang Yu, Daniel Mansfield

Affiliation(s)
Taylor Hobson Ltd., PO Box 36, 2 New Star Road, Leicester, LE4 9JQ, UK.

ABSTRACT
Accurate measurement of film thickness and its uniformity are very important to the performance of many coated surfaces and for many applications are critical. Effective inspection of the film thickness and uniformity is the key to high performance. Conventionally, film thickness is meas- ured using a spectrophotometer/reflectometer, ellipsometer or a physical step measurement; however, these techniques all have limitations. Coherence Scanning Interferometry (CSI) is an established method to measure surface topography as this technique offers many advantages such as speed, ease of use and accuracy. The measurement of “thick” films (exceeding ~1.5 μm) which gives rise to clearly separate fringe bunches is a well-established CSI capability. However, a methodology known as the ‘helical complex field’ (HCF) [1] [2] function allows film thickness to be measured down to ~25 nm. This new method, combined with Coherence Correlation Interferometry (CCI) [3] offers film thickness measurements with sub-nanometre vertical resolution and ~1 μm lateral resolution. It is ideally suited for detailed analysis of coated optical surfaces. In this paper, the fundamentals of the techniques are described and some case studies are presented.

KEYWORDS
Film Thickness, CCI, Thick Film, HCF

Cite this paper
Yu, Y. and Mansfield, D. (2015) Characterisation of Thin Films Using a Coherence Scanning Interferometry. Journal of Materials Science and Chemical Engineering, 3, 15-21. doi: 10.4236/msce.2015.31003.

References
[1]Mansfield, D. (2006) Thin Film Extraction from Scanning White Light Interferometry. Proc. of the Twenty First Annual ASPE Meeting, October.
 
[2]Mansfield, D. (2008) Extraction of Film Interface Surfaces from Scanning White Light Interferometry. Proc. SPIE, 7101, 71010U. http://dx.doi.org/10.1117/12.797978
 
[3]Bankhead, A., et al. (2004) Interferometric Surface Profiling, GB2390676.
 
[4]Yu, Y., et al. (2011) Precision Measurements of Photoresist film Thicknesses Using Scanning White Light Interferometry, International Conference on Mechanical and Electrical Technology, 3rd ICMET, Volumes 1-3.
 
[5]Maniscalco, B., et al. (2011) Metrology of Silicon Photovoltaic Cells Using Coherence Correlation Interferometry Photovoltaic Specialists Conference (PVSC), 37th IEEE.
 
[6]Granqvist, C.G. (1992) Electrochromism and Smart Window Design. Solid State Ionics, 53-56, 479-489. http://dx.doi.org/10.1016/0167-2738(92)90418-O
 
[7]Lemoine, P., et al. (2006) Measuring the Thickness of Ul-tra-Thin Diamond-Like Carbon Films. Carbon, 44, 2617- 2624. http://dx.doi.org/10.1016/j.carbon.2006.04.029
 
[8]Roy, R.K. and Lee, K.-R. (2007) “Biomedical Applications of Diamond-Like Carbon Coatings: A Review. Wiley InterScience, 83, 72-84. www.interscience.wiley.com                                                      eww150122lx
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