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Structural Analysis of ZnO Film Deposited by Means of Metal Organic Decomposition Method

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http://www.scirp.org/journal/PaperInformation.aspx?PaperID=51273#.VGGibmfHRK0

ZnO films were deposited on glass substrates by means of a metal organic decomposition (MOD) method. We investigated the effect of annealing temperature, time and the number of laminated layers on the film structure on the basis of X-ray diffraction measurements. We found the optimum conditions of the temperature and the time to be 600°C and 40 minutes for the preparation, respectively. In addition, the layer-by-layer forming was not found to degrade the film from viewpoint of X-ray line width.
Cite this paper
Ohmukai, M. , Nakagawa, T. , Kamano, M. and Uehara, N. (2014) Structural Analysis of ZnO Film Deposited by Means of Metal Organic Decomposition Method. Journal of Materials Science and Chemical Engineering, 2, 41-48. doi: 10.4236/msce.2014.211006. 
 

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http://dx.doi.org/10.1016/j.apsusc.2006.09.044             eww141111lx
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